Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to ...

Introductory Mems: Fabrication and Applications 2014, Springer, New York

ISBN-13: 9781489984210

2010 edition

Trade paperback

Introductory MEMS: Fabrication and Applications 2010, Springer, New York, NY

ISBN-13: 9780387095103