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Thin Film Encapsulation of Radio Frequency Microelectromechanical Systems Switches

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Thin Film Encapsulation of Radio Frequency Microelectromechanical Systems Switches - Marsh, Eric D
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Microelectromechanical systems (MEMS) radio frequency (RF) switches have been shown to have excellent electrical performance over a wide range of frequencies. However, cost-effective packaging techniques for MEMS switches do not currently exist. This thesis involves the design of RF-optimized encapsulations consisting of dielectric and metal layers, and the creation of a novel thin film encapsulation process to fabricate the encapsulations. The RF performance of several encapsulation designs are evaluated wit h an ...

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Thin Film Encapsulation of Radio Frequency Microelectromechanical Systems Switches 2012, Biblioscholar

ISBN-13: 9781288324354

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