The Physics and Chemistry of Sio2 and the Si-Sio2 Interface

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The properties of Si02 and the Si-Si02 interface provide the key foundation onto which the majority of semiconductor device technology has been built Their study has consumed countless hours of many hundreds of investigators over the years, not only in the field of semiconductor devices but also in ceramics, materials science, metallurgy, geology, and mineralogy, to name a few. These groups seldom have contact with each other even though they often investigate quite similar aspects of the Si02 system. Desiring to facilitate ...

The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2013, Springer-Verlag New York Inc., New York

ISBN-13: 9781489907769

1988 edition

Paperback

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The Physics and Chemistry of Sio2 and the Si-Sio2 Interface 1989, Springer, New York, NY

ISBN-13: 9780306430329

1988 edition

Hardcover

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