Substrate Surface Preparation Handbook


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Substrate Surface Preparation serves as a practical, one-stop reference, covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits. This hands-on resource offers you detailed guidance in the entire substrate surface preparation process, from lapping and polishing to specialized techniques and surface finishing. Supported with over 125 illustrations, this unique book provides you with a complete understanding of important ...

Substrate Surface Preparation Handbook 2011, Artech House Publishers

ISBN-13: 9781608072132