Sputtering Materials for VLSI and Thin Film Devices

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An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering ) for semiconductor, liquid crystal displays, high density recording media and photovoltaic device (e.g. thin film solar cell) manufacturing. This book also reviews microelectronics industry topics such as history of inventions and technology trends, recent developments in sputtering technologies, manufacturing steps that require sputtering of thin films, the ...

Sputtering Materials for VLSI and Thin Film Devices 2013, William Andrew

ISBN-13: 9780815515937

Hardcover

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