Specialty Gas Analysis: A Practical Guidebook

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The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis. Most specialty gas vendors have some re in place for quality assurance, but these usually are very simplistic and outdated methods. No book was available that gave guidance on providing accurate, reproducible data on specialty gas products. This is the first book that provides an ...

Specialty Gas Analysis: A Practical Guidebook 1996, Wiley-Vch

ISBN-13: 9780471185987

Hardcover

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Specialty Gas Analysis: A Practical Guidebook 1996, Wiley-VCH Verlag GmbH

ISBN-13: 9781560816713

Hardcover

Select