Smart Mems and Sensor Systems

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In recent years, MEMS have revolutionized the semiconductor industry, with sensors being a particularly buoyant sector. Smart MEMS and Sensor Systems presents readers with the means to understand, evaluate, appreciate and participate in the development of the field, from a unique systems perspective.The combination of MEMS and integrated intelligence has been put forward as a disruptive technology. The full potential of this technology is only evident when it is used to construct very large pervasive sensing systems. The ...

Smart MEMS and Sensor Systems 2006, Imperial College Press, London, England

ISBN-13: 9781860944932

Hardcover

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