Silicon Carbide Micro Electromechanical Systems for Harsh Environments

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This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS.This is the only book that addresses in a comprehensive ...

Silicon Carbide Micro Electromechanical Systems for Harsh Environments 2006, Imperial College Press, London, England

ISBN-13: 9781860946240

Hardcover

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