Semiconductor-On-Insulator Materials for Nanoelectronics Applications

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Devoted to the evolving field of modern nanoelectronics, this volume presents the physics and technology of nanoelectronic devices built on semiconductor-on-insulator (SemOI) systems. Topics include new semiconductor-on-insulator materials, physics of modern SemOI devices, and MEMS on SOI.

Semiconductor-On-Insulator Materials for Nanoelectronics Applications 2014, Springer, Berlin

ISBN-13: 9783642267086

2011 edition

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Semiconductor-On-Insulator Materials for Nanoelectronics Applications 2011, Springer

ISBN-13: 9783642158674

Hardcover

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