Scanning electron microscopy: physics of image formation and microanalysis

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Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Scanning Electron Microscopy: Physics of Image Formation and Microanalysis 2010, Springer-Verlag Berlin and Heidelberg GmbH & Co. K, Berlin

ISBN-13: 9783642083723

Softcover reprint of the original 2nd edition 1998

Paperback

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Scanning Electron Microscopy: Physics of Image Formation and Microanalysis 1985, Springer-Verlag Berlin and Heidelberg GmbH & Co. K, Berlin

ISBN-13: 9783540135302

Hardcover

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