Resolution Enhancement Techniques in Optical Lithography

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The acceleration of integrated circuit miniaturization is challenging lithographers to push the limits of optical lithography by ever more precise engineering and innovations. As IC device dimensions grow smaller, circuits outpace the introduction of shorter exposure wavelengths and higher numerical aperture lenses, increasing the importance of resolution enhancement techniques. This work summarizes the latest enhancement research that has matured since the 1980s. Theoretical and practical aspects of commonly used ...

Resolution Enhancement Techniques in Optical Lithography 2001, SPIE-International Society for Optical Engineering

ISBN-13: 9780819439956

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