Plasma Processing of Semiconductors

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Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge ...

Plasma Processing of Semiconductors 2012, Springer

ISBN-13: 9789401064866

Softcover Reprint of the Origi edition

Trade paperback

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Plasma Processing of Semiconductors 1997, Springer, Dordrecht, Netherlands

ISBN-13: 9780792345671

1997 edition

Hardcover

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