Optical Inspection of Microsystems

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Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date ...

Optical Inspection of Microsystems 2006, CRC Press, Boca Raton, FL

ISBN-13: 9780849336829

Hardcover

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