In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added benefits of lightweight, miniature size and low energy consumption make MEMS commercialization very attractive. Modeling and simulation is an indispensable tool in the process of studying these new dynamic phenomena, development of ...

Microsystems Dynamics 2012, Springer, Dordrecht

ISBN-13: 9789400734104

2011 edition


Microsystems Dynamics 2010, Springer

ISBN-13: 9789048197002