Micromachined Ultrasound-Based Proximity Sensors

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Micromachined Ultrasound-Based Proximity Sensors presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. It describes the characterization, optimization and the long-term stability of silicon membrane resonators as well as appropriate packaging for ultrasound microsystems. Micromachined Ultrasound-Based Proximity Sensors describes a cost-effective approach to the realization of a micro electro mechanical system (MEMS). The ...

Micromachined Ultrasound-Based Proximity Sensors 2012, Springer-Verlag New York Inc., New York, NY

ISBN-13: 9781461372691

Paperback

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Micromachined Ultrasound-Based Proximity Sensors 1999, Springer, Boston, MA

ISBN-13: 9780792385080

1999 edition

Hardcover

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