Microengineering, MEMS, and Interfacing: A Practical Guide

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MEMS devices are finding increasingly widespread use in a variety of settings, from chemical and biological analysis to sensors and actuators in automotive applications. Along with this massive growth, the field is still experiencing growing pains as fabrication processes are refined and new applications are attempted. Anyone serious about entering the field must have a realistic knowledge of just what is possible with MEMS technologies as well as the myriad issues involved in fabrication and device integration. ...

Microengineering, MEMS, and Interfacing: A Practical Guide 2006, CRC Press, Boca Raton, FL

ISBN-13: 9780824723057

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