According to Bernie Meyerson, IBM's chief technology of?cer, the traditional sc- ing of semiconductor manufacturing processes died somewhere between the 1- and 90-nanometer nodes. One of the prime reasons is the low dielectric constant of SiO - thechoice dielectricof all modern electronics. This book presents materials 2 fundamentals of the novel gate dielectrics that are being introduced into semic- ductor manufacturing to ensure the Moore's law scaling of CMOS devices. This is a very rapidly evolving?eld of research and ...

Materials Fundamentals of Gate Dielectrics 2010, Springer, Dordrecht

ISBN-13: 9789048167869


Materials Fundamentals of Gate Dielectrics 2005, Springer, Dordrecht, Netherlands

ISBN-13: 9781402030772

2005 edition