Materials Fundamentals of Gate Dielectrics - Demkov, Alexander A. (Editor), and Navrotsky, Alexandra (Editor)

According to Bernie Meyerson, IBM's chief technology of?cer, the traditional sc- ing of semiconductor manufacturing processes died somewhere between the 1- and 90-nanometer nodes. One of the prime reasons is the low dielectric constant of SiO - thechoice dielectricof all modern electronics. This book presents materials 2 fundamentals of the novel ...

Materials Fundamentals of Gate Dielectrics 2010, Springer, Dordrecht

ISBN-13: 9789048167869

Trade paperback

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Materials Fundamentals of Gate Dielectrics 2005, Springer, Dordrecht, Netherlands

ISBN-13: 9781402030772

2005 edition

Hardcover

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