MEMS and Microsystems: Design and Manufacture

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Microsystems and MEMS technology is one of the biggest breakthroughs in the area of mechanical and electronic technology in recent years. This is the technology of extremely small and powerful devices, and systems built around them, which have mechanical and electrical components. MEMS technology is expanding rapidly, with major application areas being telecommunications, biomedical technology, manufacturing and robotic systems, transportation and aerospace. This text provides an engineering design approach to MEMS and ...

Mems and Microsystems: Design and Manufacture 2001, McGraw-Hill Science/Engineering/Math, Boston, MA

ISBN-13: 9780072393910

Hardcover

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