MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness

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MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional ...

MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness 2010, Springer-Verlag New York Inc., New York, NY

ISBN-13: 9781441934895

Paperback

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MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness 2008, Springer, Berlin, Germany

ISBN-13: 9780387095356

Hardcover

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