Low Pressure Plasmas and Microstructuring Technology

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This monograph presents an up-to-date perspective on gas discharge physics and its applications to various industries. It starts with an overview of the types of plasmas and puts particular emphasis on the microscopic mechanisms of reactive processes.

Low Pressure Plasmas and Microstructuring Technology 2010, Springer

ISBN-13: 9783642099397

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Low Pressure Plasmas and Microstructuring Technology 2009, Springer, Berlin, Germany

ISBN-13: 9783540858485

Hardcover

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