Ion Implantation in Semiconductors: Science and Technology

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The technique of ion implantation has become a very useful and stable technique in the field of semiconductor device fabrication. This use of ion implantation is being adopted by industry. Another important application is the fundamental study of the physical properties of materials. The First Conference on Ion Implantation in Semiconductors was held at Thousand Oaks, California in 1970. The second conference in this series was held at Garmish-Partenkirchen, Germany, in 1971. At the third conference, which convened at ...

Ion Implantation in Semiconductors: Science and Technology 2013, Springer

ISBN-13: 9781468421538

Softcover Reprint of the Origi edition

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Ion Implantation in Semiconductors: Science and Technology 1975, Springer, New York, NY

ISBN-13: 9780306308413

Hardcover

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