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Introductory Mems - Adams, Thomas M, and Layton, Richard A

This is a practical introduction to MEMS for advanced undergraduate and graduate students. It describes sensors, actuators, and microfluidics, and their relationship with MEMS. The book has a tested pedagogical structure and an accessible writing style.

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Introductory Mems 2010, Springer

ISBN-13: 9780387560588

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