This is a practical introduction to MEMS for advanced undergraduate and graduate students. It describes sensors, actuators, and microfluidics, and their relationship with MEMS. The book has a tested pedagogical structure and an accessible writing style.

Introductory Mems: Fabrication and Applications 2014, Springer, New York

ISBN-13: 9781489984210

2010 edition

Trade paperback

Introductory MEMS: Fabrication and Applications 2010, Springer, New York, NY

ISBN-13: 9780387095103