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Introduction to Microelectromechanical(mem)Microwave Systems

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Microelectromechanical sytems (MEMS) applications in RF and microwave electronics are revolutionizing wireless communications. This text provides a comprehensive explanation of the fabrication and fundamental physics of MEMS and their applications in electronic communication systems.

Introduction to Microelectromechanical(mem)Microwave Systems 1999, Artech House Publishers, Boston, MA

ISBN-13: 9780890062821

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