Interlayer Dielectrics for Semiconductor Technologies - Muraka, Shyam P (Editor), and Eizenberg, Moshe (Editor), and Sinha, Ashok K (Editor)
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Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges. Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different ...

Interlayer Dielectrics for Semiconductor Technologies 2004, Academic Press, Amsterdam, Netherlands

ISBN-13: 9780125112215

Hardcover

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