Helium Ion Microscopy: Principles and Applications

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Helium Ion Microscopy: Principles and Applications describes the theory and discusses the practical details of why scanning microscopes using beams of light ions - such as the Helium Ion Microscope (HIM) - are destined to become the imaging tools of choice for the 21st century. Topics covered include the principles, operation, and performance of the Gaseous Field Ion Source (GFIS), and a comparison of the optics of ion and electron beam microscopes including their operating conditions, resolution, and signal-to-noise ...

Helium Ion Microscopy: Principles and Applications 2013, Springer

ISBN-13: 9781461486596

2013 edition

Trade paperback

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