Handbook of Silicon Semiconductor Metrology


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A description of cleanroom-based measurement technology used during the manufacture of silicon integrated circuits. It covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. It surveys key areas such as optical measurements and in-line calibration methods.

Handbook of Silicon Semiconductor Metrology 2001, CRC Press, New York, NY

ISBN-13: 9780824705060