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Handbook of Semiconductor Interconnection Technology

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Handbook of Semiconductor Interconnection Technology - Shwartz, Geraldine Cogin
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Covering materials, processes, equipment, methodologies, characterization techniques, clean room practices, and ways to control contamination-related defects, this work offers up-to-date information on the application of interconnection technology to semiconductors. It offers an integration of technical, patent and industry literature.

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Handbook of Semiconductor Interconnection Technology 1997, CRC Press, New York, NY

ISBN-13: 9780824799663

Hardcover