Handbook of Microlithography, Micromachining, & Microfabrication: Volume 1

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Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.

Handbook of Microlithography, Micromachining, & Microfabrication: Volume 1 1997, Institution of Electrical Engineers

ISBN-13: 9780852969069

Hardcover

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