Fabrication of Silicon Microprobes for Optical Near-Field Applications

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The development of near-field optics marked a major advance in microscopy and our ability to develop nanoscale technologies. However, the tapered optical fiber widely in use as the optical near-field probe has serious limitations in its fabrication, its optical transmission efficiency, and its use in arrays. Fabrication of Silicon Microprobes for Optical Near-Field Applications reports on several technological approaches to using silicon micromachining techniques for fabricating microprobes without the drawbacks of ...

Fabrication of Silicon Microprobes for Optical Near-Field Applications 2002, CRC Press, Boca Raton, FL

ISBN-13: 9780849311543

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