Fabrication of SiGe HBT BICMOS Technology

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Examines the design, fabrication, and application of silicon heterostructure transistors. This book focuses on SiGe HBT BiCMOS and Si/SiGe CMOS technologies. It covers topics including materials, transistor optimization, fabrication, devices, structural innovations, modeling, and simulation, and potential markets.

Fabrication of SiGe HBT BICMOS Technology 2007, CRC Press, Boca Raton, FL

ISBN-13: 9781420066876

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