FIB Nanostructures reviews a range of methods, including milling, etching, deposition, and implantation, applied to manipulate structures at the nanoscale. Focused Ion Beam (FIB) is an important tool for manipulating the structure of materials at the nanoscale, and substantially extends the range of possible applications of nanofabrication. FIB techniques are widely used in the semiconductor industry and in materials research for deposition and ablation, including the fabrication of nanostructures such as nanowires, ...

Fib Nanostructures 2016, Springer

ISBN-13: 9783319374680

Softcover Reprint of the Origi edition

Trade paperback

FIB Nanostructures 2014, Springer International Publishing AG, Cham

ISBN-13: 9783319028736

2013 edition