The topic of thin films is an area of increasing importance inmaterials science, electrical engineering and applied solid statephysics; with both research and industrial applications inmicroelectronics, computer manufacturing, and physical devices.Advanced, high-performance computers, high-definition TV, broadbandimaging systems, flat-panel displays, robotic systems, and medicalelectronics and diagnostics are a few examples of the miniaturizeddevice technologies that depend on the utilization of thin filmmaterials. This ...

Dielectric Films for Advanced Microelectronics 2007, Wiley, Chichester, England

ISBN-13: 9780470013601