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Dielectric Films for Advanced Microelectronics


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The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are a few examples of the miniaturized device technologies that depend on the utilization of thin film materials. ...

Dielectric Films for Advanced Microelectronics 2007, Wiley, Chichester, England

ISBN-13: 9780470013601