Defects in high-k gate dielectric stacks: nano-electronic semiconductor devices

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Defects in high-k gate dielectric stacks: nano-electronic semiconductor devices - Gusev, Evgeni (Editor)

The main goal of this book is to review at the nano and atomic scale the very complex scientific issues that pertain to the use of advanced high dielectric constant (high-k) materials in next generation semiconductor devices. One of the key obstacles to integrate this novel class of materials into Si nano-technology are the electronic defects in ...

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