Defect Recognition and Image Processing in Semiconductors 1997: Proceedings of the Seventh Conference on Defect Recognition and Image Processing, Berl

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Defect Recognition and Image Processing in Semiconductors 1997 provides a valuable overview of current techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This volume addresses advances in defect analyzing techniques and instrumentation and their application to substrates, epilayers, and devices. The book discusses the merits and limits of characterization techniques; standardization; correlations between defects and device performance, including ...

Defect Recognition and Image Processing in Semiconductors 1997: Proceedings of the Seventh Conference on Defect Recognition and Image Processing, Berl 1998, Taylor & Francis Us

ISBN-13: 9780750305006

1997 edition

Hardcover

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