Copper Interconnect Technology

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In this book, a leader in the field describes advanced laser systems with lower radiation wavelengths, photolithography materials, and mathematical modeling approaches to address the challenges of Cu-interconnect technology.

Copper Interconnect Technology 2014, Springer

ISBN-13: 9781489985118

2009 edition

Trade paperback

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Copper Interconnect Technology 2009, Springer, Dordrecht, Netherlands

ISBN-13: 9781441900753

Hardcover

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