This book provides a concise treatment of the chemical phenomena in lithography in a manner that is accessible to a general readership. The book presents topics on the optical and charged particle physics practiced in lithography, with a broader view of how the marriage between chemistry and optics has made possible the print and electronic revolutions of the digital age. The related aspects of lithography are thematically presented to convey a unified view of the developments in the field over time, from the very first ...

Chemistry and Lithography 2011, John Wiley & Sons Inc, New York

ISBN-13: 9781118030028

Hardcover

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Chemistry and Lithography 2011, SPIE Press, Bellingham

ISBN-13: 9780819475626

Hardcover

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