Chemical Vapor Deposited Materials Ngineering


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Chemical Vapor Deposited Materials presents a concise description of the preparation, structure, and properties of some of the most important CVD materials needed in the development of high temperature technology. Topics covered include SiC, Si3N4, and BN, as well as other carbides, borides, and nitrides. The author incorporates information from the literature with data from his own experience, which makes the book useful for improving tool bits, increasing the wear resistance of materials, and increasing the oxidation ...

Chemical Vapor Deposited Materials Ngineering 1991, CRC Press, Boca Raton, FL

ISBN-13: 9780849342196