Characterization in Compound Semiconductor Processing

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ComTPund semiconductors such as Gallium Arsenide, Gallium Aluminum Arsenide, and Indium Phosphide are often difficult to characterize and present a variety of challenges from substrate preparation, to epitaxial growth to dielectric film deTPsition to dopant introduction. This book reviews the common classes of comTPund semiconductors, their physical, optical and electrical properties and the various types of methods used for characterizing them when analyzing for defects and application problems.

Characterization in Compound Semiconductor Processing 2009, Momentum Press, Highland Park

ISBN-13: 9781606500415

Hardcover

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Characterization in Compound Semiconductor Processing 1995, Butterworth-Heinemann

ISBN-13: 9780750692663

Hardcover

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