Atomic Diffusion in Semiconductors


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The diffusion or migration of atoms in matter, of whatever form, is a basic consequence of the existence of atoms. In metals, atomic diffusion has a well established position of importance as it is recognized that there are few metallurgical processes which do not embody the diffusion of one or more of the constituents. As regards semiconductors any thermal annealing treatment involves atomic diffusion. In semiconductor technology diffusion processes provide a vital and basic means of fabricating doped structures. ...

Atomic Diffusion in Semiconductors 2012, Springer-Verlag New York Inc., New York, NY

ISBN-13: 9781461586388


Atomic Diffusion in Semiconductors 1973, Springer, London, England

ISBN-13: 9780306304552