Analysis and Design Principles of Mems Devices

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Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, ...

Analysis and Design Principles of Mems Devices 2005, Elsevier Science

ISBN-13: 9780444516169

Hardcover

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