An Introduction to Surface-Micromachining

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An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function. This book will be of interest to mechanical engineers looking to scale down into ...

An Introduction to Surface-Micromachining 2012, Springer

ISBN-13: 9781475710779

Softcover Reprint of the Origi edition

Trade paperback

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An Introduction to Surface-Micromachining 2004, Springer, Boston, MA

ISBN-13: 9781402080203

2004 edition

Hardcover

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