About this title: The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials with thicknesses below a few nanometers can be achieved using x-rays. While many books are available on the theory behind x-ray metrology (XRM), "X-Ray Metrology in Semiconductor Manufacturing" is the first book to focus on the practical aspects of the technology and its application in device fabrication and solving new materials problems. Following a general overview of the field, the first section of the book is organized by ...
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Binding: Hardback
Publisher: Taylor & Francis(CRC Press)
Date Published: 2006
ISBN-13:9780849339288ISBN:0849339286
Description: BRAND NEW HARDBACK. Written by established world experts, x-ray metrology in semiconductor manufacturing describes the applications, science, and technology of this rapidly evolving area. this book emphasizes practical metrology, with real world examples from the semiconductor and mag*n*e*t*ics industries. the authors discuss the techniques, theory, and applications of x-ray metrology in semiconductors and other advanced thin films. the book covers the essential metrological questions of ... read more
Description: New. PLEASE NOTE: All books are promptly imported from the UK using DHL or Royal Mail international mail WITH TRACKING NUMBER. Delivery is typically 5-10 working days. Please do not select expedited shipping. Professional and reliable bookseller (est.1987). Written by established world experts, X-Ray Metrology in Semiconductor Manufacturing describes the applications, science, and technology of this rapidly evolving area. This book emphasizes practical metrology, with real world examples from ... read more
Description: New. PLEASE NOTE: All books are promptly shipped from our UK warehouse using Royal Mail International Priority mail. Heavier or more expensive books are shipped with a TRACKING NUMBER. Professional and reliable bookseller (est.1987). Written by established world experts, X-Ray Metrology in Semiconductor Manufacturing describes the applications, science, and technology of this rapidly evolving area. This book emphasizes practical metrology, with real world examples from the semiconductor and ... read more
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