About this title: Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development ...
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Binding: Hardcover
Publisher: Springer
Date published: 1997
ISBN-13:9783540606581ISBN:3540606580
Description: New. BRAND NEW and ready for dispatch. Delivery normally within 4/7 days. Our reputation is built on our Speedy Delivery Service and our Customer Service Team. read more
Binding: Hardback
Publisher: SPRINGER-VERLAG BERLIN AND HEIDELBERG GMBH & CO. KG Country = GERMANY
Date published: 1997
ISBN-13:9783540606581ISBN:3540606580
Description: BRAND NEW HARDBACK. 420 pages. This book is printed on demand (allow 1-2 weeks for printing) presents basic introduction to microsystem technology and microrobotics for students, engineers, and scientists. this book surveys experimental products and important developments and technologies. it includes pictures and photos to help understanding. 277 black & white illustrations, 79 black & white halftones, 198 black & white line drawings (Hardback) read more
Binding: Hardcover
Publisher: SPVB
Date published: 2002
ISBN-13:9783540606581ISBN:3540606580
Description: PLEASE NOTE: All books are promptly imported from the UK using DHL or Royal Mail international mail WITH TRACKING NUMBER. Print on demand title. D elivery is typically 8-12 working days. Please do not select expedited shipping. Professional and reliable bookseller (est.1987). The book presents the first basic introduction to microsystem technology and microrobotics for students, engineers, and scientists. It surveys new and experimental products and important developments and technologies. ... read more
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