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ISBN: 0387095101 / ISBN-13: 9780387095103

Introductory Mems: Fabrication and Applications

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This is a practical introduction to MEMS for advanced undergraduate and graduate students. It describes sensors, actuators, and microfluidics, and ... Show synopsis

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  • Introductory MEMS: Fabrication and Applications (Springer) – Hardcover (2010)
    by Thomas M Adams, Richard A Layton

    Introductory MEMS: Fabrication and Applications

    Hardcover, Springer
    2010
    French
    444 pages

    ISBN: 0387095101
    ISBN-13: 9780387095103

    Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to ... Show more

  • Introductory Mems: Fabrication and Applications

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