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Plasma Processes for Semiconductor Fabrication
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by
W N G Hitchon, Haroon Ahmad (Editor), Michael Pepper (Editor)
Plasma processing is a central technique in the fabrication of semiconductor devices. This self-contained book provides an up-to-date description of plasma etching and deposition in semiconductor fabrication. It presents the basic physics and chemistry of these processes, and shows how they can be accurately modelled. The author begins with an ...
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