A User's Guide to Vacuum Technology

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A User's Guide to Vacuum Technology - O'Hanlon, John F

An introduction to the theory and practice of modern vacuum technology, with applications. Focuses on the understanding, operation, and selection of equipment for vacuum processes used in semiconductor, optical, and related technologies. This 2nd Edition has new information on components, lubrication, pump fluids, and other materials. Basic ...

A User's Guide to Vacuum Technology 2003, Wiley-Interscience, Hoboken, NJ

ISBN-13: 9780471270522

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A User's Guide to Vacuum Technology 1989, Wiley-Interscience, New York, NY

ISBN-13: 9780471812425

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A User's Guide to Vacuum Technology 1980, John Wiley & Sons

ISBN-13: 9780471016243

Hardcover

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