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Integrated Circuits: Chemical and Physical Processing

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Integrated Circuits: Chemical and Physical Processing - Stroeve, Peter (Editor)

Explores the complex physical and chemical operations that are designed to build structures or modify properties of materials in very thin films. Covers fundamental phenomena occurring in unit processes used to manufacture integrated circuits. Examines the most significant fundamental manufacturing processes.

Integrated Circuits: Chemical and Physical Processing 1985, American Chemical Society, Washington, DC

ISBN-13: 9780841209404

Hardcover

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