Reactive Sputter Deposition - Depla, Diederik (Editor), and Mahieu, Stijn (Editor)

In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and ... Read More

Reactive Sputter Deposition 2010, Springer-Verlag Berlin and Heidelberg GmbH & Co. K, Berlin

ISBN-13: 9783642095368

Paperback

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Reactive Sputter Deposition 2008, Springer

ISBN-13: 9783540766629

Hardcover

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