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Introductory Mems: Fabrication and Applications

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This is a practical introduction to MEMS for advanced undergraduate and graduate students. It describes sensors, actuators, and microfluidics, and their relationship with MEMS. The book has a tested pedagogical structure and an accessible writing style. Hide synopsis

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  • 1. Softcover, SPRINGER (SIE), 2012

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    2. Hardcover, Springer, 2010

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  • 3. Hardcover, Springer, 2010

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  • 4. Hardcover, Springer, 2010

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  • 8. Hardcover, Springer, 2010

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  • 9. Hardcover, Springer, 2010

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  • 10. Hardcover, Springer, 2010

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    Description: Fine. Text in English, French. Glued binding. Paper over boards...

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